Integrating testability into microsystems
| Autor: | B. Straube, Andrew Richardson, W. Vermeiren, T. Olbrich |
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| Rok vydání: | 1997 |
| Předmět: |
Microelectromechanical systems
Engineering business.industry Integrated circuit Condensed Matter Physics Electronic Optical and Magnetic Materials law.invention Domain (software engineering) Reliability (semiconductor) Built-in self-test Hardware_GENERAL Hardware and Architecture law Microsystem Electronic engineering Microelectronics Electrical and Electronic Engineering business Testability |
| Zdroj: | Microsystem Technologies. 3:72-79 |
| ISSN: | 1432-1858 0946-7076 |
| Popis: | The integration of sensors and actuators with microelectronics into either compact packages or onto a single silicon die is likely to be of major technological importance over the next decade. These systems are referred to as Microsystems or Micro-Electro-Mechanical-Systems (MEMS). One obstacle to mass-market introduction are difficulties with quality and reliability verification. This paper outlines the difficulties of testing microsystems, shows approaches of test generation and verification transferable from the mixed-signal Integrated-Circuit (IC) domain, and demonstrates an on-line test designed for bridge-type, micromachined accelerometer and pressure sensors [1]. |
| Databáze: | OpenAIRE |
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