Experimental installation to study the RF plasma flow at low pressures with experiment data synchronization

Autor:	T N Terentev, A. Yu Shemakhin, A O Sofronitsky, E. Yu. Shemakhin, V. S. Zheltukhin
Rok vydání:	2020
Předmět:	History Plasma flow Materials science Data synchronization Mechanics Plasma Computer Science Applications Education
Zdroj:	Journal of Physics: Conference Series. 1588:012018
ISSN:	1742-6596 1742-6588
DOI:	10.1088/1742-6596/1588/1/012018
Popis:	A diagram and description of an experimental setup for studying the properties of a stream of RF plasma at low pressure are presented. The setup is equipped with diagnostic devices that record the temperature, volt-ampere characteristics, and pressure in the chamber.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::81331f48572665f3b5a919967ee272e8 https://doi.org/10.1088/1742-6596/1588/1/012018 Zobrazit plný text záznamu