FASTC2D: Software for extracting 2D carrier profiles from scanning capacitance microscopy images

Autor:	Brian G. Rennex, Joseph J. Kopanski, Jay F. Marchiando
Rok vydání:	2001
Předmět:	Materials science Microscope Computer program Silicon business.industry chemistry.chemical_element Scanning capacitance microscopy Capacitance law.invention Software chemistry law Electronic engineering Optoelectronics Scanning tunneling microscope business Interpolation
Zdroj:	AIP Conference Proceedings.
ISSN:	0094-243X
DOI:	10.1063/1.1354468
Popis:	FASTC2D is a Windows based computer program for conversion of two-dimensional (2D) scanning capacitance microscope (SCM) images of doped silicon into 2D carrier profiles. It utilizes interactive, user-friendly software to allow a user to enter electrical and measurement parameters, to model the tip, and to navigate among the various choices for calculation and analysis. It achieves fast carrier profile extraction using interpolation on a rigorous database of theoretical SCM response calculated off-line.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8119176fe1d5065083727804a4d3dffc https://doi.org/10.1063/1.1354468 Zobrazit plný text záznamu