The interaction of N with Ti and the oxidation of TiN studied by soft X-ray absorption spectroscopy
| Autor: | M. Abbate, Leonardo Soriano, M. T. Czyżyk, J. C. Fuggle, H. Pen |
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| Rok vydání: | 1993 |
| Předmět: |
X-ray absorption spectroscopy
Radiation Absorption spectroscopy Thermal desorption Analytical chemistry chemistry.chemical_element Condensed Matter Physics Atomic and Molecular Physics and Optics Spectral line Electronic Optical and Magnetic Materials Ion implantation chemistry Transition metal Physical and Theoretical Chemistry Tin Spectroscopy Titanium |
| Zdroj: | Journal of Electron Spectroscopy and Related Phenomena. 62:197-206 |
| ISSN: | 0368-2048 |
| Popis: | The N1s XAS spectrum of a reference TiN sample is compared to an N p-projected DOS. Good overall agreement is found except for a small discrepancy at the edge which could be due to core-hole effects. Teh N1s XAS spectra of N 2 chemisorbed on Ti (3000 L) and N + implanted in Ti (250 eV) compare well with TiN; this indicate a close chemical similarity between them. The differences in the spectra are attributed to disorder in the implanted layer and to the two-dimensional character of the chemisorbed layer. The N1s XAS spectra of TiN oxidized at different temperatures indicate that O progressively displaces N to form TiO 2 . The results are consistent with a complete TiN/TiO 2 phase separation and rule out the possible formation of oxynitride. The appearance of a narrow peak in the spectrum of TiN oxidized at 300°C suggests that some of the N atoms displaced during the oxidation process remain relatively unbound within the TiO 2 matrix. At 500°C this peak disappears; this is attributed to N migration towards the surface followed by thermal desorption. |
| Databáze: | OpenAIRE |
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