| Autor: |
Ryo Isono, Masao Kamiya, Satoshi Degai, Haruyuki Yasui, Makoto Taki, Satoru Kaneko, Toru Harigai, Shinsuke Kunitsugu, Tsuyoshi Tanimoto, Hirofumi Takikawa, Yoshiyuki Suda, Yushi Iijima |
| Rok vydání: |
2018 |
| Předmět: |
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| Zdroj: |
AIP Conference Proceedings. |
| ISSN: |
0094-243X |
| Popis: |
Conductive hard-coating films have potential application as protective films for contact pins used in the electrical inspection process for integrated circuit chips. In this study, multi-layer diamond-like carbon (DLC) films were prepared as conductive hard-coating films. The multi-layer DLC films consisting of DLC and nitrogen-containing DLC (N-DLC) film were prepared using a T-shape filtered arc deposition method. Periodic DLC/N-DLC four-layer and eight-layer films had the same film thickness by changing the thickness of each layer. In the ball-on-disk test, the N-DLC mono-layer film showed the highest wear resistance; however, in the spherical polishing method, the eight-layer film showed the highest polishing resistance. The wear and polishing resistance and the aggressiveness against an opponent material of the multi-layer DLC films improved by reducing the thickness of a layer. In multi-layer films, the soft N-DLC layer between hard DLC layers is believed to function as a cushion. Thus, the tribolog... |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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