Magnetron sputtered TiOx layers: Structural, electrical, optical and thermochromic aspects
| Autor: | R. Reineke-Koch, A. Pazidis |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
Thermochromism
Materials science Metals and Alloys Analytical chemistry 02 engineering and technology Surfaces and Interfaces Substrate (electronics) Crystal structure Sputter deposition 021001 nanoscience & nanotechnology 01 natural sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials Titanium oxide 0103 physical sciences Cavity magnetron Materials Chemistry 010306 general physics 0210 nano-technology Layer (electronics) Stoichiometry |
| Zdroj: | Thin Solid Films. 649:43-50 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/j.tsf.2017.12.019 |
| Popis: | Titanium oxide layers were prepared by sputter deposition with plasma emission monitoring in the whole stoichiometry range between Ti and TiO2 without and with substrate heating to 240 °C. The layers were characterized with regard to their crystal structure and specific resistance. Optical constants were determined in the spectral range between 240 nm and 38 μm. The thermochromic behavior of a prepared Ti2O3 layer was measured and compared to calculations for bulk material. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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