Atomic Layer Growth of Tungsten and Boron for Multilayer X-ray Optics
Autor: | J.K. Shurtleff, D.D. Allred, R.T. Perkins, L.V. Knight, J.M. Thorne, J.D. Phillips |
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Rok vydání: | 1992 |
Zdroj: | Soft-X-Ray Projection Lithography. |
Popis: | We are investigating atomic layer growth which can produce crystalline superlattices or amorphous multilayers with smaller periods and better uniformity than currently available. |
Databáze: | OpenAIRE |
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