Atomic Layer Growth of Tungsten and Boron for Multilayer X-ray Optics

Autor: J.K. Shurtleff, D.D. Allred, R.T. Perkins, L.V. Knight, J.M. Thorne, J.D. Phillips
Rok vydání: 1992
Zdroj: Soft-X-Ray Projection Lithography.
Popis: We are investigating atomic layer growth which can produce crystalline superlattices or amorphous multilayers with smaller periods and better uniformity than currently available.
Databáze: OpenAIRE