A Study on High-Output Resonance-Driven Piezoelectric Micropumps Using Active Check Valves
Autor: | Kazuhiro Yoshida, Shinichi Yokota, Jung-Ho Park, Takeshi Seto, Chikara Ishikawa, Kunihiko Takagi |
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Rok vydání: | 2004 |
Předmět: | |
Zdroj: | Journal of Robotics and Mechatronics. 16:171-177 |
ISSN: | 1883-8049 0915-3942 |
DOI: | 10.20965/jrm.2004.p0171 |
Popis: | A novel high-output resonance-driven piezoelectric micropump using two active check valves in place of conventional passive check valves used in inlet and outlet is proposed. It actively controls opening/closing of check valves using piezoelectric actuator synchronizing with expansion/contraction of pump chamber. A prototype micropump is fabricated with an effective size of 17×8×1mm3. When tap water is used as the working fluid, pumping characteristics of the fabricated pump are experimentally investigated using an adequate timing control for valve opening/closing. From experimental results, it is ascertained that optimal values of the phase shift for the voltage to drive the pump chamber to realize a miniaturized but powerful micropump are 15° in inlet check valve and 195° in outlet. Based on obtained results, a sheet active shuttle valve that has a unified valve body for inlet and outlet check valves is newly proposed. A micropump with an effective size of 10×10×10mm3is fabricated and the basic characteristics are experimentally investigated. |
Databáze: | OpenAIRE |
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