A Study on High-Output Resonance-Driven Piezoelectric Micropumps Using Active Check Valves

Autor: Kazuhiro Yoshida, Shinichi Yokota, Jung-Ho Park, Takeshi Seto, Chikara Ishikawa, Kunihiko Takagi
Rok vydání: 2004
Předmět:
Zdroj: Journal of Robotics and Mechatronics. 16:171-177
ISSN: 1883-8049
0915-3942
DOI: 10.20965/jrm.2004.p0171
Popis: A novel high-output resonance-driven piezoelectric micropump using two active check valves in place of conventional passive check valves used in inlet and outlet is proposed. It actively controls opening/closing of check valves using piezoelectric actuator synchronizing with expansion/contraction of pump chamber. A prototype micropump is fabricated with an effective size of 17×8×1mm3. When tap water is used as the working fluid, pumping characteristics of the fabricated pump are experimentally investigated using an adequate timing control for valve opening/closing. From experimental results, it is ascertained that optimal values of the phase shift for the voltage to drive the pump chamber to realize a miniaturized but powerful micropump are 15° in inlet check valve and 195° in outlet. Based on obtained results, a sheet active shuttle valve that has a unified valve body for inlet and outlet check valves is newly proposed. A micropump with an effective size of 10×10×10mm3is fabricated and the basic characteristics are experimentally investigated.
Databáze: OpenAIRE