| Popis: |
The paper presents the concept of a miniature X-ray source fabricated entirely in the MEMS technology. Our construction integrates all the components, including high vacuum micropump, on a single silicon-glass chip. The source generates a conical X-ray beam by using a properly formed transmitting target. In the presented research most attention was paid to determining the optimal target parameters as well as exposure conditions (electron beam energy, exposure time, observation distance and thickness of the target material). |
