| Autor: |
Hans Knuppertz, Matthias Gruber, Holger Winkelmann, Martin Mogl, Michael Bohling |
| Rok vydání: |
2010 |
| Předmět: |
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| Zdroj: |
2010 IEEE Sensors. |
| DOI: |
10.1109/icsens.2010.5690314 |
| Popis: |
We report about design, fabrication, and experimental characterization of a compact sensor head for gas analysis via atomic emission spectroscopy. The novelty of our approach is the integration of a micro-hollow cathode structure for plasma generation and an optical collector on a common planar micro-systems platform. The sensor head is designed for a fiber optic spectrometer. Elliptically-shaped reflector segments are used for the plasma-to-fiber imaging. A demonstrator was fabricated by use of ultra-precision machining techniques. Experimental tests show an improved optical coupling efficiency and a sensitivity in the ppb range for the detection of CCl 2 F 2 in He. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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