Productivity improvement by module life extension with software approach using Availability MAXimization (AMAX) functionality

Autor:	Futoshi Sato, Taku Yamazaki, Toshihiro Oga, Sophia Hu
Rok vydání:	2020
Předmět:	Life extension Software business.industry Computer science AMAX Maximization business Productivity Industrial engineering
Zdroj:	Optical Microlithography XXXII.
DOI:	10.1117/12.2515589
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::803aa5a6597b9d8d897163fd5ec687cb https://doi.org/10.1117/12.2515589 Zobrazit plný text záznamu