A 22-ng/$\surd$ Hz 17-mW Capacitive MEMS Accelerometer With Electrically Separated Mass Structure and Digital Noise- Reduction Techniques
| Autor: | Yudai Kamada, K. Watanabe, Takashi Oshima, Taizo Yamawaki, Akira Matsumoto, Keijiro Mori, Naoki Mori, Tomonori Sekiguchi, Yuki Furubayashi, Atsushi Isobe |
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| Rok vydání: | 2020 |
| Předmět: |
Microelectromechanical systems
Materials science business.industry Capacitive sensing 020208 electrical & electronic engineering Hardware_PERFORMANCEANDRELIABILITY 02 engineering and technology Integrated circuit Accelerometer Capacitance law.invention Capacitor CMOS Hardware_GENERAL law Hardware_INTEGRATEDCIRCUITS 0202 electrical engineering electronic engineering information engineering Optoelectronics Electrical and Electronic Engineering business Electronic circuit |
| Zdroj: | IEEE Journal of Solid-State Circuits. 55:2539-2552 |
| ISSN: | 1558-173X 0018-9200 |
| DOI: | 10.1109/jssc.2020.2991533 |
| Popis: | A fully integrated micro-electromechanical system (MEMS) accelerometer with extremely low noise level (22 ng/ $\surd $ Hz) and sufficiently low power consumption (17 mW) for emerging applications (such as infrastructure monitoring and next-generation oil and gas exploration) was developed. By applying concurrent operations of detection and control (enabled by a unique MEMS element) and reducing servo-signal leakage and noise caused by an interaction of 1-bit quantization and asymmetric mass deformation in the digital domain, a ninefold-lower noise level is achieved in comparison with state-of-the-art low-noise low-power MEMS accelerometers. The MEMS element was fabricated on 6-in Si/SOI/Si bonding wafers, while the detection and driver integrated circuits were fabricated as interface circuits with the standard 0.13- $\mu \text{m}$ complementary metal–oxide–semiconductor (CMOS) process and the high-voltage 0.35- $\mu \text{m}$ CMOS process, respectively. The power consumption of the developed MEMS accelerometer is 17 mW from 1.4-, 1.8-, and 12-V supplies, and it has an input range of ±0.55 g and bandwidth of 400 Hz. |
| Databáze: | OpenAIRE |
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