Optical and electrical characterization of gradient AZO thin film by magnetron sputtering
| Autor: | Bing Wang, Jia-heng Feng, Li-dan Tang, Bin Zhao, Bang-wu Liu |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Materials science Analytical chemistry 02 engineering and technology Sputter deposition 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials X-ray photoelectron spectroscopy Electrical resistivity and conductivity 0103 physical sciences Cavity magnetron Transmittance Electrical and Electronic Engineering Thin film 0210 nano-technology Visible spectrum Wurtzite crystal structure |
| Zdroj: | Journal of Materials Science: Materials in Electronics. 27:10320-10324 |
| ISSN: | 1573-482X 0957-4522 |
| DOI: | 10.1007/s10854-016-5115-z |
| Popis: | Gradient Al-doped ZnO (AZO) thin films were deposited by magnetron sputtering. The effects of Al concentration gradient on the structure, optical and electrical properties of gradient AZO films were investigated by X-ray diffraction, X-ray photoelectron spectroscopy, four probe tester and UV–visible spectrophotometer. Results show that all of the gradient AZO films have the hexagonal wurtzite structure with c axis preferential orientation and no other secondary phase exits. With the increase of the Al concentration gradient, the resistivity of AZO thin films deteriorates. The resistivity was least, 1.18 × 10−2 Ω cm, for magnetron sputtering-gradient AZO films at 0.02 % nm−1 Al concentration gradient. The average transmittance of the gradient AZO thin films on the glasses in the band of visible light is about 80 %. |
| Databáze: | OpenAIRE |
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