Temperature compensated radio-frequency harmonic bulk acoustic resonators pressure sensors
| Autor: | T. Baron, E. Lebrasseur, J. P. Romand, S. Alzuaga, S. Queste, G. Martin, D. Gachon, T. Laroche, S. Ballandras, J. Masson |
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| Rok vydání: | 2010 |
| Předmět: |
010302 applied physics
Materials science business.industry 020502 materials Lithium niobate Polishing 02 engineering and technology 01 natural sciences Pressure sensor chemistry.chemical_compound Resonator 0205 materials engineering Lapping Stack (abstract data type) chemistry 0103 physical sciences Optoelectronics Wafer business Quartz |
| Zdroj: | 2010 IEEE International Ultrasonics Symposium. |
| Popis: | In this work, we propose a compensated temperature pressure sensor fabricated on compound LiNbO 3 /Quartz/Quartz substrates obtained by Au/Au bonding at room temperature and double face lapping/polishing of LiNbO 3 /Quartz stack and a final gold bonding with a structured Quartz wafer. This paper shows the possibility to obtain device which is intrinsically low sensitive to thermal effects, and even allowing a second order compensation thanks to the Quartz thermal stability Sensitivity of the final sensor to bending moments then is tested and results show pressure sensitivity of such devices. |
| Databáze: | OpenAIRE |
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