Rapid Thermal Annealing (RTA) of Hydrogenated Poly-Si under Air and Nitrogen and Blister Formation

Autor:	Arpan Sinha, Sagnik Dasgupta, Ajeet Rohatgi, Mool Gupta
Rok vydání:	2022
Zdroj:	2022 IEEE 49th Photovoltaics Specialists Conference (PVSC).
DOI:	10.1109/pvsc48317.2022.9938775
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7fd3471346ff22ab8d7e96eec387741d https://doi.org/10.1109/pvsc48317.2022.9938775 Zobrazit plný text záznamu