Molding of Pb and Zn with microscale mold inserts
Autor: | Kevin W. Kelly, Wen Jin Meng, D. Guidry, D. M. Cao |
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Rok vydání: | 2003 |
Předmět: |
Insert (composites)
Materials science Metallurgy Molding (process) Surface engineering Condensed Matter Physics medicine.disease_cause Electronic Optical and Magnetic Materials Hardware and Architecture Mold visual_art medicine visual_art.visual_art_medium Ceramic Electrical and Electronic Engineering Composite material Foundry LIGA Microscale chemistry |
Zdroj: | Microsystem Technologies. 9:559-566 |
ISSN: | 1432-1858 0946-7076 |
DOI: | 10.1007/s00542-003-0308-9 |
Popis: | Molding of Pb and Zn metal plates with LiGA (Lithographie, Galvanoformung, Abformung) fabricated Ni microscale mold inserts was carried out at 300 °C. Both as fabricated Ni inserts and Ni inserts conformally coated with Ti-containing hydrocarbon (Ti-C:H) coatings were used. The molding performance was characterized both in terms of feature generation on the metal plates and insert condition after molding. The present results demonstrate that, in cases where significant metal/insert chemical interactions exist, surface engineering of the mold insert is necessary to obtain satisfactory performance, and that conformal deposition of suitably engineered ceramic coatings onto Ni microscale mold inserts is an effective means for achieving high temperature micromolding of reactive metals. |
Databáze: | OpenAIRE |
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