Molding of Pb and Zn with microscale mold inserts

Autor: Kevin W. Kelly, Wen Jin Meng, D. Guidry, D. M. Cao
Rok vydání: 2003
Předmět:
Zdroj: Microsystem Technologies. 9:559-566
ISSN: 1432-1858
0946-7076
DOI: 10.1007/s00542-003-0308-9
Popis: Molding of Pb and Zn metal plates with LiGA (Lithographie, Galvanoformung, Abformung) fabricated Ni microscale mold inserts was carried out at 300 °C. Both as fabricated Ni inserts and Ni inserts conformally coated with Ti-containing hydrocarbon (Ti-C:H) coatings were used. The molding performance was characterized both in terms of feature generation on the metal plates and insert condition after molding. The present results demonstrate that, in cases where significant metal/insert chemical interactions exist, surface engineering of the mold insert is necessary to obtain satisfactory performance, and that conformal deposition of suitably engineered ceramic coatings onto Ni microscale mold inserts is an effective means for achieving high temperature micromolding of reactive metals.
Databáze: OpenAIRE