Comparison of glow discharge cleaning and ion‐impact desorption of stainless steel

Autor:	David N. Ruzic, C. M. Loxton, Glenn Gerdin
Rok vydání:	1986
Předmět:	Glow discharge Microprobe Auger electron spectroscopy Materials science Hydrogen Metallurgy chemistry.chemical_element Surfaces and Interfaces Condensed Matter Physics Surfaces Coatings and Films chemistry Desorption Surface layer Layer (electronics) Surface finishing
Zdroj:	Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 4:1232-1235
ISSN:	1520-8559 0734-2101
Popis:	The effects of glow discharge cleaning (GDC) and ion‐impact desorption (IID) of impurities on 302 stainless steel were compared using Auger electron spectroscopy (AES). Hydrogen GDC was done in a chamber attached to the Auger microprobe allowing transfer in vacuo to lessen recontamination. GDC removed the surface hydrocarbon layer, but deposited many constituents of the cathode and surrounding areas onto the sample. It also induced a high concentration of carbon which extended beyond the surface layer. The extent of the carbon layer varied with the prior treatment of the surface. IID is shown to maintain a higher surface purity. The feasibility of helium IID as an after‐opening or between‐shot cleaning technique for magnetic fusion experiments is discussed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7f8c5c5bb94d186ee2edb934c1a19449 https://doi.org/10.1116/1.573404 Zobrazit plný text záznamu