A Study on Electrochemical Machining Method in Ultrapure Water. Etching Process of Si(001) Surface Atom by Hydroxyl Function

Autor:	Yuzo Mori, Yasushi Toma, Kikuzi Hirose, Itsuki Kobata, Hidekazu Goto
Rok vydání:	2001
Předmět:	Surface (mathematics) Materials science Chemical engineering Etching (microfabrication) Mechanical Engineering Scientific method Ultrapure water Atom Electrochemical machining
Zdroj:	Journal of the Japan Society for Precision Engineering. 67:1321-1326
ISSN:	1882-675X 0912-0289
DOI:	10.2493/jjspe.67.1321
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7f85cc14785911d78ac7810cd582db16 https://doi.org/10.2493/jjspe.67.1321 Zobrazit plný text záznamu