Hysteretic scattering-based, super-resolution mapping of silicon nanostructures
Autor: | Po-Hsueh Tseng, Kentaro Nishida, Pang-Han Wu, Yu-Lung Tang, Yu-Chieh Chen, Chi-Yin Yang, Jhen-Hong Yang, Wei-Ruei Chen, Mihail Petrov, Kuo-Ping Chen, Shi-Wei Chu |
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Rok vydání: | 2023 |
Zdroj: | Silicon Photonics XVIII. |
Databáze: | OpenAIRE |
Externí odkaz: |