Design and performance analysis of an optical profilometer for stand-off control

Autor:	C R Chatwin, H A Abdullah
Rok vydání:	1994
Předmět:	Materials science business.industry Applied Mathematics Instrumentation Linearity Laser law.invention Lens (optics) Optics Linear range law Focal length Profilometer business Engineering (miscellaneous) Gaussian beam
Zdroj:	Measurement Science and Technology. 5:517-525
ISSN:	1361-6501 0957-0233
DOI:	10.1088/0957-0233/5/5/009
Popis:	A prototype noncontact high-bandwidth optoelectronic probe for surface topology and laser materials processing stand-off control is presented. Radiation from a low-power laser beam is focused onto a workpiece surface; the spatial variation in the reflected irradiance is modelled. A Gaussian beam and radiometric system model are investigated and compared with experimental results. The experimental results lie between the Gaussian and radiometric simulations which appear to be limiting cases. The system facilitates a measuring range of +or-6 mm. A predicted performance is reported for the device. A set of experiments are performed, results are analysed and compared with the mathematical models. The approximate range of instrument linearity is +or-1 mm for the 75 mm focal length main lens and +or-2 mm for the 120 mm lens; in this linear range the optimal accuracy resolution is 1 mu m.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7f378de34b9242ea853e9b2e70d15552 https://doi.org/10.1088/0957-0233/5/5/009 Zobrazit plný text záznamu