Evaluation of the effectiveness of the use of arc plasma generator with distributed parameters for the deposition of functional coatings at low pressures
| Autor: | I Dautov, G. Yu. Dautov, N Kashapov, G. R. Zakirova |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
History
Chemistry Nuclear engineering Enthalpy Analytical chemistry Plasma treatment 02 engineering and technology Plasma 021001 nanoscience & nanotechnology 01 natural sciences Plasma generator Computer Science Applications Education Arc (geometry) Sputtering 0103 physical sciences Deposition (phase transition) 010306 general physics 0210 nano-technology Plasmatron |
| Zdroj: | Journal of Physics: Conference Series. 669:012006 |
| ISSN: | 1742-6596 1742-6588 |
| DOI: | 10.1088/1742-6596/669/1/012006 |
| Popis: | The estimation of the mean mass enthalpy at the outlet of the plasmatron with distributed parameters. Non-equilibrium plasma at low pressures allows to combine the processes of plasma treatment and sputtering. It is necessary to consider the influence of electrode erosion. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|