TNK — synchrotron radiation source for submicron technology applications

Autor:	Alexander Valentinov, V.V. Anashin, E. I. Gorniker, G.Ya. Kurkin, N.G. Gavrilov, A.S. Medvedko, V. N. Osipov, Emil Trakhtenberg, Vladimir Korchuganov, Vladimir Ushakov, G.N. Kulipanov, V.G. Veshcherevich, Yu.G. Matvejev, A.N. Skrinsky, V.S. Kuzminykh, P.D. Vobly, E.A. Kuper, S.P. Petrov, V. M. Petrov, Evgeny Levichev, N.I. Zubkov
Rok vydání:	1991
Předmět:	Technological research Nuclear and High Energy Physics Materials science business.industry Synchrotron Radiation Source Optoelectronics business Instrumentation Engineering physics Storage ring
Zdroj:	Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 308:45-49
ISSN:	0168-9002
Popis:	A general presentation on the main storage ring of the Zelenograd Technological Research Center is given. The TNK SR source is intended to create a basis for the industrial realization of advanced X-ray lithographic technology. A modern analytical center for materials science will be established, based on the TNK facility.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7efce38ead68b95f404f87a1db8ee843 https://doi.org/10.1016/0168-9002(91)90584-d Zobrazit plný text záznamu