A PLASMA GENERATOR WITH SECTIONALIZED INTERELECTRODE INSERTS AND ITS USAGE IN A VACUUM SET-UP FOR DEPOSITING DIAMOND-LIKE FILMS
| Autor: | V.G. Karolinskiy, A.I. Pekun, V.A. Kuzmich, A.P. Novikov, M.I. Sazonov, V.M. Khvisevich |
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| Rok vydání: | 2023 |
| Zdroj: | Proceedings of the International Thermal Plasma Processes Conference. |
| DOI: | 10.1615/itppc-1998.1360 |
| Databáze: | OpenAIRE |
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