Thermal Decomposition Studies of Organoplatinum Films

Autor:	J. A. Cairns, M. R. Davidson, Yongchang Fan, Alexander G. Fitzgerald, G. J. Berry
Rok vydání:	2002
Předmět:	X-ray photoelectron spectroscopy Hydrogen Silicon Annealing (metallurgy) Chemistry Thermal decomposition Analytical chemistry chemistry.chemical_element Thin film Microstructure Platinum Analytical Chemistry
Zdroj:	Microchimica Acta. 139:49-54
ISSN:	1436-5073 0026-3672
DOI:	10.1007/s006040200038
Popis:	This study examines the thermal decomposition of 1,5-cyclooctadiene platinum (II) chloride organometallic films, deposited by thermal evaporation. The thin film samples were annealed both in air and hydrogen with well-controlled temperature regimes. After annealing, the decomposed thin films were examined by AFM and STM scanning probe, XPS and TEM microbeam analytical techniques. The experimental results confirm that the thermal decomposition products on silicon substrates are composed predominantly of metallic platinum. Annealing in hydrogen can reduce substantially the decomposition temperature of the material from around 250 to 160 °C but the surface morphology of the decomposed films is significantly different to those annealed in air. The metallic nature of the thermally decomposed films was confirmed by bonding configuration recognition, electronic property probing and microstructure analysis.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7ed9d60e234b7026d06407ad10decd2f https://doi.org/10.1007/s006040200038 Zobrazit plný text záznamu Full text from SpringerLink