Autor:	Rudolf Beckmann, Holger Reus, Rainer Götzelmann, Alfons Zöller, Harro Hagedorn
Rok vydání:	2007
Předmět:	Materials science Optical coating Carbon film business.industry Analytical chemistry Optoelectronics Plasma Electron Thin film business Layer (electronics) Refractive index Ion
Zdroj:	Optical Interference Coatings.
Popis:	The performance of a new large rf-plasma source for large box coaters is investigated in respect to layer performance and achievable growth rates. The optical constants of SiO2 and TiO2 thin films are presented.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7ed7637426c957f250504ea0b4c74359 https://doi.org/10.1364/oic.2007.mb3 Zobrazit plný text záznamu