Systematic Review on Design and Development of Efficient Semiconductor Based Surface Acoustic Wave Gas Sensor
| Autor: | Payal Patial, Manish Deshwal |
|---|---|
| Rok vydání: | 2021 |
| Předmět: |
Flammable liquid
Materials science business.industry 010401 analytical chemistry Surface acoustic wave 02 engineering and technology Acoustic wave 021001 nanoscience & nanotechnology 01 natural sciences Engineering physics 0104 chemical sciences Electronic Optical and Magnetic Materials chemistry.chemical_compound Semiconductor chemistry Nanometre Development (differential geometry) Sensitivity (control systems) Electrical and Electronic Engineering Thin film 0210 nano-technology business |
| Zdroj: | Transactions on Electrical and Electronic Materials. 22:385-393 |
| ISSN: | 2092-7592 1229-7607 |
| DOI: | 10.1007/s42341-021-00332-1 |
| Popis: | In today’s digital world, the industries have adopted the automized machines that are remotely controlled. So in such environment various types of monitoring have become an essential part. One of them is gas sensing mechanisms that are implemented to monitor various types of harmful /toxic/flammable gases. As available in the literature, there are various methods available for the detection of such gases. In the present review, the authors are considering the Surface Acoustic Waves based gas sensors only. The present review paper discusses about various parameters that can be enhanced for an optimized sensitivity and the selectivity for a particular sensor. The present study also compares the bulk material sensing properties with sensing properties of thin films. The thin films are generally distinguished from bulk material due to their thicknesses that are in the range of several nanometers but much less than 700 nm after which a material attains bulk properties. |
| Databáze: | OpenAIRE |
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