Multi-functional integrated sensors for the environment

Autor:	R. S. Williams, Joo Yong Sim, B. Dura, D. A. Wickeraad, Matthew A. Hopcroft, C. L. Roozeboom, Peter G. Hartwell, W. S. Smith, Beth L. Pruitt
Rok vydání:	2012
Předmět:	Engineering business.industry Electro-optical sensor Process (computing) Chip Sensor fusion Die (integrated circuit) law.invention law Sensor node Electronic engineering Photolithography business Wireless sensor network
Zdroj:	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).
DOI:	10.1109/memsys.2012.6170114
Popis:	We present multi-functional integrated sensors for the environment (MFISEs) combining ten sensor functions on a single silicon die. The purpose of the MFISEs chip is to monitor important environmental parameters such as temperature, humidity and air speed, along with acceleration in three axes. Through a common fabrication process and integrated sensor design, the ten sensing functions required only five photolithography mask steps. To our knowledge, MFISEs demonstrates the highest degree of sensor fusion on a single die. Sensor integration is a key enabler of new applications in mobile electronics and wireless sensor networks, and the potential to use MFISEs for ten sensing functions provides significant cost, size, and power savings over ten individual devices.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7e5ecb836700d61f7fcf708b6f58faa7 https://doi.org/10.1109/memsys.2012.6170114 Zobrazit plný text záznamu