An out-of-plane FR4-MEMS Scanning Grating for NIR Spectrometer Applications

Autor:	Russell Farrugia, Barnaby Portelli, Ivan Grech, Joseph Micallef, Owen Casha, Edward Gatt
Rok vydání:	2022
Zdroj:	2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7e1c9db473acd615c903dcfc9840a4f1 https://doi.org/10.1109/dtip56576.2022.9911731 Zobrazit plný text záznamu