Excitation Patterns and Heating Mechanisms During E-H-Mode Transition in Inductively Coupled RF Oxygen Discharges
| Autor: | Thomas Wegner, C. Küllig, Jürgen Meichsner |
|---|---|
| Rok vydání: | 2014 |
| Předmět: |
Nuclear and High Energy Physics
Materials science Phase (waves) chemistry.chemical_element Condensed Matter Physics Oxygen chemistry Inductively coupled plasma atomic emission spectroscopy Electron heating Optical emission spectroscopy Radio frequency Atomic physics Inductively coupled plasma Excitation |
| Zdroj: | IEEE Transactions on Plasma Science. 42:2830-2831 |
| ISSN: | 1939-9375 0093-3813 |
| DOI: | 10.1109/tps.2014.2310501 |
| Popis: | Optical excitation patterns and electron heating mechanisms were investigated in inductively coupled radio frequency oxygen discharges by phase and space resolved optical emission spectroscopy. Four excitation patterns due to different electron heating mechanisms were found during the E-H-mode transition. |
| Databáze: | OpenAIRE |
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