Investigation of scanning electron beam parameters in terms of the disk-charged approximation for the sample potential
Autor: | Wasan J. Kadhem, Musatfa Mohaisen Abid, Hassan N. Al-Obaidi |
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Rok vydání: | 2016 |
Předmět: |
010302 applied physics
Physics Conventional transmission electron microscope business.industry Scanning electron microscope 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials Optics Electron tomography 0103 physical sciences Scanning transmission electron microscopy Laser beam quality Electrical and Electronic Engineering Electron beam-induced deposition 0210 nano-technology business Environmental scanning electron microscope Beam (structure) |
Zdroj: | Optik. 127:6978-6981 |
ISSN: | 0030-4026 |
DOI: | 10.1016/j.ijleo.2016.05.017 |
Popis: | A theoretical investigation of electron behavior inside the scanning electron microscope chamber for the mirror image operation mode has been carried out. The equation of motion of this head-incident electron is derived in terms of the energy conservation law. By solving this equation the influence of beam parameters are investigated. Results have shown that a good comprehend and interpret for the physical behaviors of scanning electron can be extracted. It is found that the beam current may be used to control mirror images only in the lower values of scanning potential. Also the size of scanning beam has no effect on mirror image as long as the beam current is kept fixed. |
Databáze: | OpenAIRE |
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