Self-rolled-up InGaAs/GaAs microtubes fabricated directly on Si (100) substrates
| Autor: | Xia Zhang, Yifan Wang, Yongqing Huang, Xiaoyi Li, Yunxia Gao, Bochang Li, Zhihong Pan, Qi Wang, Xiaomin Ren, Eryang Wang, Zhigang Jia |
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| Rok vydání: | 2014 |
| Předmět: |
Materials science
Average diameter Scanning electron microscope business.industry Ingaas gaas Atomic force microscopy Process Chemistry and Technology Nanotechnology Surfaces Coatings and Films Electronic Optical and Magnetic Materials Gallium arsenide chemistry.chemical_compound chemistry Materials Chemistry Optoelectronics Electrical and Electronic Engineering business Instrumentation Microfabrication |
| Zdroj: | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 32:030603 |
| ISSN: | 2166-2754 2166-2746 |
| DOI: | 10.1116/1.4869557 |
| Popis: | The authors have fabricated the high-performance smooth-walled InGaAs/GaAs microtubes directly on Si (100) substrates. All the strained In0.2Ga0.8As (15 nm)/GaAs (35 nm) bilayers metamorphically grown on Si have rolled up into microtubes from the long-side of rectangular patterns. The average diameter of Si-based microtubes is ∼4.2 μm, which is slightly bigger than that of their GaAs-based counterparts. Scanning electron microscopy and atomic force microscopy measurements show that the structural properties of the Si-based InGaAs/GaAs microtubes have been quite good and nearly consistent with the GaAs-based counterparts except for very slight surface undulation. |
| Databáze: | OpenAIRE |
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