Dielectric SiO2Planarization Using MnO2Slurry

Autor:	Syuhei Kurokawa, Sadahiro Kishii, Kenzo Hanawa, Yoshihiro Arimoto, Ko Nakamura, Satoru Watanabe, Toshiro Doi
Rok vydání:	2012
Předmět:	Materials science Physics and Astronomy (miscellaneous) business.industry Gate dielectric General Engineering General Physics and Astronomy Optoelectronics Dielectric business Dielectric spectroscopy
Zdroj:	Japanese Journal of Applied Physics. 51:016501
ISSN:	1347-4065 0021-4922
DOI:	10.7567/jjap.51.016501
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7dc4f04bcacd750b106fb0d052f87017 https://doi.org/10.7567/jjap.51.016501 Zobrazit plný text záznamu