Molybdenum(iv) dithiocarboxylates as single-source precursors for AACVD of MoS2 thin films

Autor: Saleh Muhammad, Erik T. Ferenczy, Ian M. Germaine, J. Tyler Wagner, Muhammad T. Jan, Lisa McElwee-White
Rok vydání: 2022
Předmět:
Zdroj: Dalton Transactions. 51:12540-12548
ISSN: 1477-9234
1477-9226
DOI: 10.1039/d2dt01852g
Popis: Deposition of MoS2 from Mo(S2CMe)4 demonstrates use of dithiocarboxylate ligands for sulfur in single source precursors for TMD materials.
Databáze: OpenAIRE