Stress-Depth Profiles in Magnetron Sputtered Mo Films Using Grazing Incidence X-Ray Diffraction (GIXD)
| Autor: | P. K. Predecki, D. N. Braski, B. L. Ballard |
|---|---|
| Rok vydání: | 1993 |
| Předmět: |
Materials science
Analytical chemistry 02 engineering and technology General Medicine 021001 nanoscience & nanotechnology 010403 inorganic & nuclear chemistry 01 natural sciences 0104 chemical sciences Stress (mechanics) Grazing Cavity magnetron X-ray crystallography 0210 nano-technology Incidence (geometry) |
| Zdroj: | Advances in X-ray Analysis. 37:189-196 |
| ISSN: | 2631-3626 0376-0308 |
| Popis: | Intrinsic stresses as a function of σ, the 1/e penetration depth were measured for a smooth, 1μm thick, fine grained, cylindrical post magnetron sputtered molybdenum film deposited on a vycor glass substrate in the dynamic deposition mode. Using grazing incidence diffraction and the Mo (321) reflection, lattice spacing profiles were determined for τ values from 200-4400 Å. The in-plane intrinsic stresses parallel and perpendicular to the post axis were determined employing the ϕ-integral method and assuming elastic isotropy. The results were related to the surface structure and composition profiles via atomic force microscopy (AFM) and auger electron spectroscopy (AES) respectively. |
| Databáze: | OpenAIRE |
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