Mathematical model of Boltzmann’s sigmoidal equation applicable to the set-up of the RF-magnetron co-sputtering in thin films deposition of $$\hbox {Ba}_{{x}}\hbox {Sr}_{1-{x}} \hbox {TiO}_{3}$$ Ba x Sr 1 - x TiO 3
| Autor: | Miguel A. Corona-Rivera, J Reséndiz-Muñoz, J. L. Fernández-Muñoz, Víctor M. Ovando-Medina, M. Zapata-Torres, A. Márquez-Herrera |
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| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Materials science Analytical chemistry Order (ring theory) 02 engineering and technology Substrate (electronics) Sputter deposition 021001 nanoscience & nanotechnology 01 natural sciences Mechanics of Materials Sputtering 0103 physical sciences Cavity magnetron General Materials Science Thin film 0210 nano-technology Stoichiometry Solid solution |
| Zdroj: | Bulletin of Materials Science. 40:1043-1047 |
| ISSN: | 0973-7669 0250-4707 |
| DOI: | 10.1007/s12034-017-1441-x |
| Popis: | In this work, we present the stoichiometric behaviour of $$\hbox {Ba}^{2+}$$ and $$\hbox {Sr}^{2+}$$ when they are deposited to make a solid solution of barium strontium titanate. $$\hbox {Ba}_{{x}}\hbox {Sr}_{1-{x}} \hbox {TiO}_{3}$$ (BST) thin films of nanometric order on a quartz substrate were obtained by means of in-situ RF-magnetron co-sputtering at 495 $${^{\circ }}$$ C temperature, applying a total power of 120 W divided into intervals of 15 W that was distributed between two magnetron sputtering cathodes containing targets of $$\hbox {BaTiO}_{3}$$ and $$\hbox {SrTiO}_{3}$$ , as follows: 0–120, 15–105, 30–90, 45–75, 60–60, 75–45, 90–30, 105–15 and 120–0 W. Boltzmann’s sigmoidal modified equation (Boltzmann’s profile) is proposed to explain the behaviour and the deposition ratio Ba/Sr of the BST as a function of the RF-magnetron power. The Boltzmann’s profile proposal shows concordance with experimental data of deposits of BST on substrates of nichrome under the same experimental conditions, showing differences in the ratio Ba/Sr of the BST due to the influence of the substrate. |
| Databáze: | OpenAIRE |
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