Aspects of laser micromachining for sensor prototyping

Autor:	Peter Vincent, Phillip J. McMahon, Alan Richard Wilson, Richard F. Muscat
Rok vydání:	2006
Předmět:	Rapid prototyping Surface micromachining Materials science Machining law Uv laser Process (computing) Mechanical engineering Structural health monitoring Laser Laser micromachining law.invention
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.696536
Popis:	Recent advances in UV laser machining have allowed the development of accurate and rapid prototyping of micro scale devices. Two examples are presented of how modern UV laser micro machining may be applied to novel applications in engineering research and the development of state of the art micro sensors for structural health monitoring. We also show how micro device development is now a rapid process where novel procedures allowing the manual handling of work pieces may be used to make two layer laser machined devices with alignment to tens of microns.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7d8b3a7fdfc794f045afefe5db6480d2 https://doi.org/10.1117/12.696536 Zobrazit plný text záznamu