Characterization of diamondlike carbon films grown by super‐wide electron‐cyclotron resonance plasma assisted chemical vapor deposition

Autor:	S. Minomo, T. Kobayashi, M. Sugiyo, S. Amadatsu, M. Taniguchi, A. Ishii
Rok vydání:	1994
Předmět:	Permittivity Materials science Carbon film Analytical chemistry Field effect Surfaces and Interfaces Plasma Chemical vapor deposition Thin film Condensed Matter Physics Microwave Electron cyclotron resonance Surfaces Coatings and Films
Zdroj:	Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 12:1068-1071
ISSN:	1520-8559 0734-2101
Popis:	An electron‐cyclotron resonance plasma source that generates 500 mm wide plasma has been developed. The plasma is generated by a 2.45 GHz traveling microwave which is supplied through a long slot antenna prepared in the waveguide in a divergent magnetic field generated by permanent magnets and a solenoid coil. Diamondlike carbon (DLC) films were deposited in a wide zone 320 mm in width. The breakdown field was 8.4×106 V/cm and permittivity, 3.89. The prepared Al/DLC/Si metal/insulator/semiconductor diode revealed fairly good field effect in its capacitance–voltage curve.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7d8525bda8304daba26c03e5819704a6 https://doi.org/10.1116/1.579286 Zobrazit plný text záznamu