Selectively Nucleated Lateral Crystallization of Lead Zirconate Titanate Thin Films Using Titanium Island Seed Layer
| Autor: | Seung-Ki Joo, Nam-Kyu Song, Jong-In Yun |
|---|---|
| Rok vydání: | 2004 |
| Předmět: |
Materials science
Annealing (metallurgy) Metallurgy chemistry.chemical_element Condensed Matter Physics Lead zirconate titanate Ferroelectricity Electronic Optical and Magnetic Materials law.invention chemistry.chemical_compound chemistry Control and Systems Engineering law Materials Chemistry Ceramics and Composites Grain boundary Electrical and Electronic Engineering Crystallization Composite material Thin film Leakage (electronics) Titanium |
| Zdroj: | Integrated Ferroelectrics. 64:259-267 |
| ISSN: | 1607-8489 1058-4587 |
| Popis: | We have investigated the selectively nucleated lateral crystallization (SNLC) of lead zirconate titanate (PZT) thin film using a titanium seed. The titanium island seed layer was formed on Pt(200 nm)/SiO2(500 nm)/Si by radio frequency magnetron sputtering and lift-off process at room temperature. Selectively nucleated lateral crystallization happened at 570°C and a rectangular array of PZT single grains was formed after 2 hours annealing. Single-grained PZT thin film by SNLC had a comparable hysteresis property with the poly-grained PZT thin film in spite of the lower crystallization temperature. In addition, it had better leakage and fatigue properties than the poly-grained PZT thin film. Enhanced ferroelectric properties of single-grained PZT could be achieved by grain boundary location control. Also, because Titanium-seeded SNLC needs no additional annealing and etching for the seed formation, it is more advantageous than PZT-seeded SNLC. |
| Databáze: | OpenAIRE |
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