SOI structure employed area dependant capacitive MEMS accelerometer with novel C–V converter

Autor:	Kannan Solai, Joseph Daniel Rathnasami, Sumangala Koilmani
Rok vydání:	2022
Předmět:	Hardware and Architecture Electrical and Electronic Engineering Condensed Matter Physics Electronic Optical and Magnetic Materials
Zdroj:	Microsystem Technologies. 28:1191-1201
ISSN:	1432-1858 0946-7076
DOI:	10.1007/s00542-022-05278-9
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7d40f56a3526dc8086e5b7bd11a8c339 https://doi.org/10.1007/s00542-022-05278-9 Zobrazit plný text záznamu Full text from SpringerLink