Hf- and Zr-based alkaline earth perovskite dielectrics for memory applications
| Autor: | J. Dbrowski, O. Seifarth, H.-J. Müssig, Gunther Lippert, Grzegorz Kozlowski, G. Łupina, P. Dudek |
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| Rok vydání: | 2009 |
| Předmět: |
Permittivity
Thin layers Materials science Analytical chemistry chemistry.chemical_element Dielectric Condensed Matter Physics Capacitance Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry Electrical and Electronic Engineering Thin film Tin High-κ dielectric Perovskite (structure) |
| Zdroj: | Microelectronic Engineering. 86:1842-1844 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/j.mee.2009.03.019 |
| Popis: | We investigate a group of Hf- and Zr-based dielectrics crystallizing in the cubic perovskite structure for memory applications. The dielectrics are deposited in the form of thin layers ( |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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