Very Thin Amorphous and Microcrystalline Silicon Films Deposited by Hot-Wire Chemical Vapour Deposition for Photovoltaic Applications
| Autor: | Urban Weber, M. Kupich, B. Schröder, Chandrachur Mukherjee |
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| Rok vydání: | 2003 |
| Předmět: |
Amorphous silicon
Materials science Doping Nanocrystalline silicon Chemical vapor deposition Condensed Matter Physics Electrostatic spray-assisted vapour deposition Atomic and Molecular Physics and Optics Amorphous solid law.invention chemistry.chemical_compound chemistry Chemical engineering law Solar cell General Materials Science Metalorganic vapour phase epitaxy |
| Zdroj: | Solid State Phenomena. 93:87-98 |
| ISSN: | 1662-9779 |
| DOI: | 10.4028/www.scientific.net/ssp.93.87 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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