Sputtered yttria partially stabilized zirconia layers applied to thin film heat fluxmeters
| Autor: | C. Diot, M. Clery, P. Kayser, J. C. Godefroy, C. Gageant |
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| Rok vydání: | 1992 |
| Předmět: |
Materials science
Thermal resistance Mineralogy Surfaces and Interfaces General Chemistry Condensed Matter Physics Microstructure Surfaces Coatings and Films Thermal conductivity Electrical resistivity and conductivity Sputtering Materials Chemistry Cubic zirconia Composite material Thin film Yttria-stabilized zirconia |
| Zdroj: | Surface and Coatings Technology. :308-314 |
| ISSN: | 0257-8972 |
| DOI: | 10.1016/s0257-8972(09)90067-6 |
| Popis: | Yttria partially stabilized zirconia (YPSZ) was selected to provide the thermal resistance of high temperture thin film fluxmeters for use in turbomachinery experimentation (up to 1000–1100°C). Study of the sensor requires knowledge of the physical properties of this material such as structure and microstructure, adhesion, thermal ageing resistance, electrical insulation and thermal conductivity. Measurements of these properties, on 10 μ m thick layers deposited by r.f. cathodic sputtering, are presented. |
| Databáze: | OpenAIRE |
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