Growth of Thin Graphite Films on a Dielectric Substrate using Heteroepitaxial Synthesis

Autor: V. A. Luzanov, I. A. Sorokin, E. G. Shustin, D. V. Kolodko
Rok vydání: 2020
Předmět:
Zdroj: Technical Physics Letters. 46:497-500
ISSN: 1090-6533
1063-7850
DOI: 10.1134/s1063785020050260
Popis: A technique for growing thin graphite films on a dielectric substrate by annealing the Al2O3(0001)/Ni(111)/ta-C structure has been optimized. This technique is based on catalytic decomposition of hydrocarbons on the surface of a single-crystal catalyst metal film on a dielectric substrate and subsequent diffusion and crystallization of carbon between the metal film and the substrate. A thin graphite film with a low density of crystal-structure defects is obtained on the dielectric substrate after chemical etching of the metal film.
Databáze: OpenAIRE
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