Outgassing Characteristics of an Unbaked Vacuum System by Pressure Rise Method

Autor:	Osamu Motojima, Kazuhiro Ezaki, Y. Kubota, Kenya Akaishi
Rok vydání:	1999
Předmět:	Hydrogen Analytical chemistry chemistry.chemical_element Condensed Matter Physics Surfaces Coatings and Films Pressure rise Outgassing chemistry Vacuum chamber Gas composition Electrical and Electronic Engineering Quadrupole mass analyzer Body orifice Water vapor
Zdroj:	SHINKU. 42:204-207
ISSN:	1880-9413 0559-8516
DOI:	10.3131/jvsj.42.204
Popis:	The outgassing rates of an unbaked vacuum chamber were measured by the orifice pumping and the pressre rise methods. It was found that the measured outgassing rates were dependent on pumping speed. The change of residual gas composition in the test chamber during measurement of outgassing rate was observed by a quadrupole mass analyzer. Before cut-off pumping, water vapor was a predominant desorbing gas, but after cut off pumping, hydrogen became a predominant desorbing gas instead of water.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7ca51223786d8bf01644dfd240079688 https://doi.org/10.3131/jvsj.42.204 Zobrazit plný text záznamu