Modulation Ellipsometry - A New Technique for the Characterization of Semiconductor Materials and Complex Semiconductor Structures

Autor:	Th. Dittrich, L. Schrottke, J. Th. Zettler
Rok vydání:	1990
Předmět:	Semiconductor Materials science business.industry Ellipsometry Modulation Semiconductor materials Optoelectronics Condensed Matter Physics business Electronic Optical and Magnetic Materials Characterization (materials science)
Zdroj:	physica status solidi (a). 119:K91-K95
ISSN:	1521-396X 0031-8965
DOI:	10.1002/pssa.2211190160
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7c7de8f43eb2312d827fbb7d282fc73f https://doi.org/10.1002/pssa.2211190160 Zobrazit plný text záznamu Plný text