Fabrication of varifocal scanner integrated with piezoresistive focal length and angle sensor

Autor:	Takashi Sasaki, Kazuhiro Hane, Hideki Sasaki, Hiromasa Furuta, Jiro Kamiya, Kenta Nakazawa
Rok vydání:	2017
Předmět:	010302 applied physics Scanner Materials science Fabrication business.industry 02 engineering and technology 021001 nanoscience & nanotechnology Rotation 01 natural sciences Piezoresistive effect Optics 0103 physical sciences Focal length Degree (angle) 0210 nano-technology business Laser beams
Zdroj:	2017 International Conference on Optical MEMS and Nanophotonics (OMN).
Popis:	We present the varifocal scanner combined with the piezoresistors to monitor the rotation angle and focal length. The angle sensor measures with the accuracy of ±0.021 degree in the range of ±1.2 degree.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7c52b77f6f84d1b215df1cf9927a3e4f https://doi.org/10.1109/omn.2017.8051506 Zobrazit plný text záznamu