Micromachined droplet ejector arrays for controlled ink-jet printing and deposition

Autor:	Butrus T. Khuri-Yakub, Gökhan Perçin
Rok vydání:	2002
Předmět:	Materials science business.industry Dielectric Injector Edge (geometry) law.invention Surface micromachining Planar Transducer law Optoelectronics Deposition (phase transition) business Instrumentation Body orifice
Zdroj:	Review of Scientific Instruments. 73:2193-2196
ISSN:	1089-7623 0034-6748
Popis:	In this article, we present a variation on the design of the micromachined flextensional transducer for use to eject liquids. The transducer is constructed by depositing a piezoelectric thin film to a thin, edge clamped, circular annular plate. By placing a fluid behind one face of a vibrating compound plate that has an orifice at its center, we achieve continuous or drop-on-demand ejection of the fluid. We present results of ejection of water and isopropanol. The ejector is harmless to sensitive fluids and can be used to eject fuels, organic polymers, low-k dielectrics, chemical, and biological samples. Micromachined two-dimensional array piezoelectrically actuated flextensional droplet ejectors were realized using planar silicon micromachining techniques. Typical resonant frequency of the micromachined device ranges from 400 kHz to 4.5 MHz. The ejection of water through a 5 μm diameter orifice at 3.5 MHz was demonstrated by using the developed micromachined two-dimensional array ejectors.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7c4ba79e7c06ea2eb040f6944b4e41f5 https://doi.org/10.1063/1.1468684 Zobrazit plný text záznamu