Micromachined droplet ejector arrays for controlled ink-jet printing and deposition
Autor: | Butrus T. Khuri-Yakub, Gökhan Perçin |
---|---|
Rok vydání: | 2002 |
Předmět: | |
Zdroj: | Review of Scientific Instruments. 73:2193-2196 |
ISSN: | 1089-7623 0034-6748 |
Popis: | In this article, we present a variation on the design of the micromachined flextensional transducer for use to eject liquids. The transducer is constructed by depositing a piezoelectric thin film to a thin, edge clamped, circular annular plate. By placing a fluid behind one face of a vibrating compound plate that has an orifice at its center, we achieve continuous or drop-on-demand ejection of the fluid. We present results of ejection of water and isopropanol. The ejector is harmless to sensitive fluids and can be used to eject fuels, organic polymers, low-k dielectrics, chemical, and biological samples. Micromachined two-dimensional array piezoelectrically actuated flextensional droplet ejectors were realized using planar silicon micromachining techniques. Typical resonant frequency of the micromachined device ranges from 400 kHz to 4.5 MHz. The ejection of water through a 5 μm diameter orifice at 3.5 MHz was demonstrated by using the developed micromachined two-dimensional array ejectors. |
Databáze: | OpenAIRE |
Externí odkaz: |