Low energy ion scattering as a depth profiling tool for thin layers - Case of bromine methanol etched CdTe
| Autor: | Lubomír Grmela, Pavel Moravec, Josef Polčák, O. Šik, Eduard Belas, Jan Staněk, Petr Bábor |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Materials science Thin layers Analytical chemistry 02 engineering and technology Substrate (electronics) 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Cadmium telluride photovoltaics Surfaces Coatings and Films X-ray photoelectron spectroscopy Low-energy ion scattering Etching (microfabrication) 0103 physical sciences Surface layer 0210 nano-technology Instrumentation Single crystal |
| Zdroj: | Vacuum. 152:138-144 |
| ISSN: | 0042-207X |
| Popis: | We have investigated the properties of the Te-rich surface layer formed after a bromine-methanol etch of CdTe single crystal by two methods: Angle Resolved X-Ray Photoelectron Spectroscopy (ARXPS) and Low Energy Ion Scattering (LEIS) in the Dynamic mode. We compare the acquisition time of each method. The results showed similar, exponential decay of the Te/Cd ratio to a depth of 6 nm. At the depths higher than 6 nm, the substrate becomes stoichiometric. Dynamic LEIS provided more detailed information about composition at depths lower than the probing depth of ARXPS. The Dynamic LEIS measurements suggest that the composition of the outermost layer of CdTe after bromine-methanol etching consists of CdTe 4 . |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect