Room-temperature luminescence in semi-insulating polycrystalline silicon implanted with Er

Autor: S. U. Campisano, Salvatore Lombardo, Albert Polman, G.N. van den Hoven
Rok vydání: 1995
Předmět:
Zdroj: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 96:378-381
ISSN: 0168-583X
Popis: We demonstrate sharp room-temperature electroluminescence at 1.54 μm due to intra-4f transitions of Er3+ in semi-insulating polycrystalline silicon (SIPOS) implanted with Er and annealed for implant damage recovery. Our measurements refer to SIPOS containing ≈ 30 at.% O, doped with Er to concentrations of about 1 at.% and annealed at a temperature in the 400–1100°C range. The luminescence has been excited either by optically pumping with an Ar laser or by biasing suitable metal-SIPOS-p+ silicon devices.
Databáze: OpenAIRE