A quick method to fabricate large glass micromodel networks
| Autor: | Thormod E. Johansen, Lesley A. James, Maziyar Mahmoodi, Sedigheh Mahdavi |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
Materials science
Laser beam machining Mechanical engineering 02 engineering and technology Micromodel 021001 nanoscience & nanotechnology Condensed Matter Physics Engraving Isotropic etching Electronic Optical and Magnetic Materials law.invention 020401 chemical engineering Hardware and Architecture Etching (microfabrication) law visual_art visual_art.visual_art_medium Microtechnology 0204 chemical engineering Electrical and Electronic Engineering Photolithography 0210 nano-technology Microscale chemistry |
| Zdroj: | Microsystem Technologies. 24:2419-2427 |
| ISSN: | 1432-1858 0946-7076 |
| DOI: | 10.1007/s00542-018-3828-z |
| Popis: | The study of multi-phase fluid flow in microfluidic devices provides an opportunity for researchers to characterize effective factors and mechanisms in microscale. The application of microtechnology in various fields of science and engineering has always raised different technical problems that require further research and developments. This paper aims to address the associated challenges with micromodel studies that employ the chemical (wet) etching method for making glass micromodels. To overcome these challenges, recent advances in chemical etching are modified and combined to decrease the construction time and costs. The general steps in the chemical etching process are masking, etching, and bonding. First, the common masking step [projecting the designed pattern (regular or irregular) on the acid-resistant layer] in this work is simplified by engraving the mirror plates with a CO2 laser. This new technique skips the required facilities for photoresist layer deposition and UV lithography by using direct laser beam machining of pre-coated soda lime glasses (mirror). Moreover, the variety of mirror products and flexible functionality of laser machines make it possible to create larger size models with any desirable flow pattern. Next, the general composition of solution used in the etching step and the operating conditions of thermal bonding step are modified based on recent investigations in literature to enhance the mechanical strength of the micromodel. Finally, the fabricated model with this procedure is applied in a two-phase flow visualization study to examine the practical features under experimental conditions. |
| Databáze: | OpenAIRE |
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